(see video for course description)
Course Objective: Fabricate and measure a silicon photonic circuit, using methods similar to what is used for CMOS electronics: 1) design an optical circuit using an open-source layout tool, optical modelling TCAD software (Technology Computer Aided Design), and Matlab, 2) fabricate it using a state-of-the-art electron beam lithography, 3) conduct post-processing (thin film deposition, optical lithography, metal deposition), 4) perform characterization (AFM, SEM, optical, electronic).